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离子束辅助磁控溅射沉积CrNx薄膜结构以及力学性能研究
汪爱英; 张栋 孙丽丽王振玉柯培玲汪爱英
2013-12-01
Source Publication真空科学与技术学报
Issue12Pages:1—5
Subject Area材料科学
URL查看原文
Funding Project中科院机构知识仓储项目
Document Type期刊论文
Identifierhttp://ir.nimte.ac.cn/handle/174433/10103
Collection宁波所知识产出
Corresponding Author汪爱英
Recommended Citation
GB/T 7714
汪爱英,张栋 孙丽丽王振玉柯培玲汪爱英. 离子束辅助磁控溅射沉积CrNx薄膜结构以及力学性能研究[J]. 真空科学与技术学报,2013(12):1—5.
APA 汪爱英,&张栋 孙丽丽王振玉柯培玲汪爱英.(2013).离子束辅助磁控溅射沉积CrNx薄膜结构以及力学性能研究.真空科学与技术学报(12),1—5.
MLA 汪爱英,et al."离子束辅助磁控溅射沉积CrNx薄膜结构以及力学性能研究".真空科学与技术学报 .12(2013):1—5.
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