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题名: Deposition and Characterization of Ga-Doped ZnO Coatings on Polyimide Flexible substrates
作者: Che Bingchen;  Zhu Chaoting;  Tan Ruiqin;  Li Jia;  Huang Qijin;  Song Weijie
发表日期: 2015
摘要: 采用射频(RF)磁控溅射技术在室温条件下制备了基于柔性PI衬底上不同氧化镓(Ga_2O_3)掺杂浓度的ZnO(GZO)薄膜
出处: Chinese Journal of Vacuum Science and Technology
Appears in Collections:2015专题_期刊论文

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Recommended Citation:
Che Bingchen,Zhu Chaoting,Tan Ruiqin,et al.Deposition And Characterization Of Ga-doped Zno Coatings On Polyimide Flexible Substrates[J].Chinese Journal Of Vacuum Science And Technology,2015,35(12):1507-1512.

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