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题名: Uniform Growth of Nano-crystalline Diamond Thin Films by DC-glow Discharge CVD
作者: You Zhiheng;  Man Weidong;  Lv Jilei;  Yang Shuo;  He Lian;  Xu Qunfeng;  Bai Hua;  Jiang Nan
发表日期: 2015
摘要: 采用直流辉光放电化学气相沉积设备,以H_2 /CH_4 /Ar混合气体为工作气体,在2英寸硅片沉积出了晶粒尺寸为20 ~ 40 nm的纳米金刚石薄膜
出处: Journal of Synthetic Crystals
Appears in Collections:2015专题_期刊论文

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Recommended Citation:
You Zhiheng,Man Weidong,Lv Jilei,et al.Uniform Growth Of Nano-crystalline Diamond Thin Films By Dc-glow Discharge Cvd[J].Journal Of Synthetic Crystals,2015,44(10):2746-2750.

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