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题名: Influence of Deposition Temperature on Microstructures and Mechanical Properties of Magnetron Sputtered V-Al-Si-N Coatings
作者: Wang Enqing;  Li Miaolei;  Zhu Ping;  Huang Feng;  Yue Jianling
发表日期: 2015
摘要: 采用磁控溅射工艺制备了不同沉积温度的V-A1-Si-N涂层,利用X射线衍射、扫描电镜、纳米压痕仪和摩擦磨损试验机对涂层的结构和性能进行了分析
出处: Chinese Journal of Vacuum Science and Technology
Appears in Collections:2015专题_期刊论文

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Recommended Citation:
Wang Enqing,Li Miaolei,Zhu Ping,et al.Influence Of Deposition Temperature On Microstructures And Mechanical Properties Of Magnetron Sputtered V-al-si-n Coatings[J].Chinese Journal Of Vacuum Science And Technology,2015,35(8):1005-1010.

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