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题名: Synthesis and Characterization of Magnetron Sputtered V-Al-Ta-N Coatings
作者: Pei Wang;  Zhu Ping;  Duan Jinhui;  Liang Yin;  Huang Feng;  Liu Jianxiong
发表日期: 2015
摘要: 利用磁控溅射法制备出不同成分的(VA1)_(1-x)Ta_xN涂层,用X射线衍射、扫描电镜、原子力显微镜表征涂层微观结构,利用纳米压痕仪和摩擦磨损试验机测试了 Ta含量对涂层的力学性能和摩擦磨损性能的影响
出处: Chinese Journal of Vacuum Science and Technology
Appears in Collections:2015专题_期刊论文

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Recommended Citation:
Pei Wang,Zhu Ping,Duan Jinhui,et al.Synthesis And Characterization Of Magnetron Sputtered V-al-ta-n Coatings[J].Chinese Journal Of Vacuum Science And Technology,2015,35(6).

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