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题名: Accurate Determination of Optical Constants of Amorphous Absorbing Thin Films by Spectroscopic Ellipsometry
作者: Li Jiang;  Li Pei;  Huang Feng;  Wei Xianhua;  Ge Fangfang;  Li Peng
发表日期: 2015
摘要: 采用光谱型椭偏仪(SE)和分光光度计分别测量了超薄类金刚石(DLC)薄膜和非晶硅(a-Si)薄膜的椭偏参数(psi 和△)和透射率T
出处: Acta Optica Sinica
Appears in Collections:2015专题_期刊论文

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Recommended Citation:
Li Jiang,Li Pei,Huang Feng,et al.Accurate Determination Of Optical Constants Of Amorphous Absorbing Thin Films By Spectroscopic Ellipsometry[J].Acta Optica Sinica,2015,35(4).

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