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Effect of magnetic and electric coupling fields on micro- and nano-structure of carbon films in the CVD diamond process and their electron field emission property
Wang, Yijia; Li, Jiaxin; Hu, Naixiu; Jiang, Yunlu; Wei, Qiuping; Yu, Zhiming; Long, Hangyu; Zhu, Hekang; Xie, Youneng; Ma, Li; Lin, Cheng-Te; Su, Weitao
2018
发表期刊MATERIALS RESEARCH EXPRESS
卷号5期号:3
摘要In this paper, both electric field and magnetic field were used to assist the hot filament chemical vapor deposition (HFCVD) and we systematically investigated the effects of which on the (1) phase composition, (2) grain size, (3) thickness and (4) preferred orientation of diamond films through SEM, Raman and XRD. The application of magnetic field in electric field, so called 'the magnetic and electric coupling fields', enhanced the graphitization and refinement of diamond crystals, slowed down the decrease of film thickness along with the increase of bias current, and suppressed diamond (100) orientation. During the deposition process, the electric field provided additional energy to HFCVD system and generated large number of energetic particles which might annihilate at the substrate and lose kinetic energy, while the Lorentz force, provided by magnetic field, could constrict charged particles (including electrons) to do spiral movement, which prolonged their moving path and life, thus the system energy increased. With the graphitization of diamond films intensified, the preferred orientation of diamond films completely evolved from (110) to (100), until the orientation and diamond phase disappeared, which can be attributed to (I) the distribution and concentration ratio of carbon precursors (C2H2 and CH3) and (II) graphitization sequence of diamond crystal facets. Since the electron field emission property of carbon film is sensitive to the phase composition, thickness and preferred orientation, nano-carbon cones, prepared by the negative bias current of 20 mA and magnetic field strength of 80 Gauss, exhibited the lowest turn-on field of 6.1 V-1 mu m(-1).
关键词Chemical-vapor-deposition Bias-enhanced Nucleation X-ray-diffraction Amorphous-carbon Methyl Radicals Thin-films Surface Orientation Growth-mechanism Raman-spectra Hot-filament
学科领域Chemistry ; Science & Technology - Other Topics ; Materials Science
语种英语
文献类型期刊论文
条目标识符http://ir.nimte.ac.cn/handle/174433/16780
专题2018专题
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GB/T 7714
Wang, Yijia,Li, Jiaxin,Hu, Naixiu,et al. Effect of magnetic and electric coupling fields on micro- and nano-structure of carbon films in the CVD diamond process and their electron field emission property[J]. MATERIALS RESEARCH EXPRESS,2018,5(3).
APA Wang, Yijia.,Li, Jiaxin.,Hu, Naixiu.,Jiang, Yunlu.,Wei, Qiuping.,...&Su, Weitao.(2018).Effect of magnetic and electric coupling fields on micro- and nano-structure of carbon films in the CVD diamond process and their electron field emission property.MATERIALS RESEARCH EXPRESS,5(3).
MLA Wang, Yijia,et al."Effect of magnetic and electric coupling fields on micro- and nano-structure of carbon films in the CVD diamond process and their electron field emission property".MATERIALS RESEARCH EXPRESS 5.3(2018).
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