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The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge
Zuo, Xiao; Chen, Rende; Liu, Jingzhou; Ke, Peiling; Wang, Aiying
2018
发表期刊AIP ADVANCES
卷号8期号:1
摘要The electrical characteristics and spectroscopic properties have been comprehensively investigated in a DC superimposed high power impulse magnetron sputtering (DC-HiPIMS) deposition system in this paper. The influence of superimposed DC current on the variation of target and substrate currentw aveforms, active species and electron temperatures with pulse voltages are focused. The peak target currents in DC-HiPIMS are lower than in HiPIMS. The time scales of the two main discharge processes like ionization and gas rarefaction in DC-HiPIMS are analyzed. When the pulse voltage is higher than 600 V, the gas rarefaction effect becomes apparent. Overall, the ionization process is found to be dominant in the initial similar to 00 mu s during each pulse. The active species of Ar and Cr in DC-HiPIMS are higher than in HiPIMS unless that the pulse voltage reaches 900 V. However, the ionization degree in HiPIMS exceeds that in DC-HiPIMS at around 600 V. The electron temperature calculated by modified Boltzmann plot method based on corona model has a precipitous increase from 0.87 to 25.0 eV in HiPIMS, but varies mildly after the introduction of the superimposed DC current. Additionally, the current from plasma flowing to the substrate is improved when a DC current is superimposed with HiPIMS. (c) 2018 Author(s).
关键词Nanocomposite Coatings Sputter-deposition Plasma Microstructure Films Bias
学科领域Chemistry
语种英语
文献类型期刊论文
条目标识符http://ir.nimte.ac.cn/handle/174433/16924
专题2018专题
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GB/T 7714
Zuo, Xiao,Chen, Rende,Liu, Jingzhou,et al. The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge[J]. AIP ADVANCES,2018,8(1).
APA Zuo, Xiao,Chen, Rende,Liu, Jingzhou,Ke, Peiling,&Wang, Aiying.(2018).The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge.AIP ADVANCES,8(1).
MLA Zuo, Xiao,et al."The influence of superimposed DC current on electrical and spectroscopic characteristics of HiPIMS discharge".AIP ADVANCES 8.1(2018).
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