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Measurement-based optimization and analysis of alpha-IGZO/Ag/alpha-IGZO transparent conducting electrodes fabricated using DC magnetron sputter deposition
Chee, Kuan W. A.; Meng, Fanping; Lai, David C.; Huang, Feng
2018
发表期刊CERAMICS INTERNATIONAL
卷号44期号:17页码:20939-20946
摘要Transparent conducting electrodes have been systematically developed for optoelectronic devices and applications in industry through materials exploration and manufacturing process optimization. The nanostructural, optical and electrical properties were correlated with the embedded Ag interlayer thickness for the first time, for alpha-IGZO/Ag/alpha-IGZO trilayer electrodes fabricated using DC magnetron sputter deposition. Optimizing the Ag interlayer thickness at 14 nm achieves a maximum Haacke figure of merit (FOM) of 7.3 x 10(-3) Omega(-1), at least two orders of magnitude greater than that of the single IGZO film, with X-ray diffraction patterns indicating a crystalline phase that is also retained for thicker layers. Electrical and surface topography measurements confirm a uniform, continuous Ag interlayer film with bulk metallic behavior and resistivity as low as 6 x 10(-5) Omega cm. Experimentally-calibrated finite-element modeling and ray tracing simulations unravel in the multilayer films, backscattering and transmission effects from random surface roughness, as well as phonon- or ionized impurity-scattering mediated free carrier absorption plus surface/interface scattering and interference effects. Moreover, film thickness-sensitive tuning of the optical bandgap between 2.98 and 3.14 eV was demonstrated, yielding a maximum bandgap and Haacke FOM at the optimized Ag interlayer thickness, and with many-body interactions outcompeting the Burstein-Moss effect above this thickness.
关键词Thin-films Electrical-properties Solar-cells Oxides Temperature Performance Substrate Figure Merit Azo
学科领域Chemistry ; Materials Science ; Physics
语种英语
文献类型期刊论文
条目标识符http://ir.nimte.ac.cn/handle/174433/16980
专题2018专题
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GB/T 7714
Chee, Kuan W. A.,Meng, Fanping,Lai, David C.,et al. Measurement-based optimization and analysis of alpha-IGZO/Ag/alpha-IGZO transparent conducting electrodes fabricated using DC magnetron sputter deposition[J]. CERAMICS INTERNATIONAL,2018,44(17):20939-20946.
APA Chee, Kuan W. A.,Meng, Fanping,Lai, David C.,&Huang, Feng.(2018).Measurement-based optimization and analysis of alpha-IGZO/Ag/alpha-IGZO transparent conducting electrodes fabricated using DC magnetron sputter deposition.CERAMICS INTERNATIONAL,44(17),20939-20946.
MLA Chee, Kuan W. A.,et al."Measurement-based optimization and analysis of alpha-IGZO/Ag/alpha-IGZO transparent conducting electrodes fabricated using DC magnetron sputter deposition".CERAMICS INTERNATIONAL 44.17(2018):20939-20946.
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