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Aqueous Solution Induced High-Dielectric-Constant AlOx : Y Films for Thin-Film Transistor Applications
Wu, Weihua; Javaid, Kashif; Liang, Lingyan; Yu, Jingjing; Liang, Yu; Song, Anran; Yao, Meiyi; Lan, Linfeng; Cao, Hongtao
2018
发表期刊JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
卷号18期号:11页码:7566-7572
摘要Aqueous solution induced method is regarded as a promising route to realize high-performance metal oxide thin film transistors at low temperature with an economical and environment friendly process. In this paper, we report the synthesis of multi-component AlOx : Y dielectrics with a small amount of yttrium homogeneously distributed in AlOx matrix through an alternate spin-coating process. The AlOx : Y films demonstrate superior characteristics, such as improved surface morphology, better capacitance coupling effect, smaller dielectric dispersion, and similar leakage current density compared to AlOx films of nearly twofold thickness. By elevating the pre-baking temperature, the dielectric performance of AlOx : Y films has been further optimized, exhibiting a near-atomically smooth surface, a low current density of 8 x 2x10(-8) A cm(-2) at 2 MV/cm, and a dielectric constant of 7.4. And the corresponding thin-film transistor with amorphous InGaZnO channel shows a narrow working voltage range (< 2.5 V), a field-effect mobility around 10 cm(2) V-1 s(-1), and an on/off current ratio exceeding 107 coupled with the gate current lower than 1 nA in the entire operation range.
关键词Amorphous Oxide Semiconductors Field-effect Transistors Low-temperature Gate Dielectrics Low-voltage Photochemical Activation Electrical Performance Combustion Synthesis High-mobility Electronics
学科领域Materials Science ; Physics
语种英语
文献类型期刊论文
条目标识符http://ir.nimte.ac.cn/handle/174433/17079
专题2018专题
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GB/T 7714
Wu, Weihua,Javaid, Kashif,Liang, Lingyan,et al. Aqueous Solution Induced High-Dielectric-Constant AlOx : Y Films for Thin-Film Transistor Applications[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2018,18(11):7566-7572.
APA Wu, Weihua.,Javaid, Kashif.,Liang, Lingyan.,Yu, Jingjing.,Liang, Yu.,...&Cao, Hongtao.(2018).Aqueous Solution Induced High-Dielectric-Constant AlOx : Y Films for Thin-Film Transistor Applications.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,18(11),7566-7572.
MLA Wu, Weihua,et al."Aqueous Solution Induced High-Dielectric-Constant AlOx : Y Films for Thin-Film Transistor Applications".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 18.11(2018):7566-7572.
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