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Band alignment of In2O3/beta-Ga2O3 interface determined by X-ray photoelectron spectroscopy
Sun, Shun-Ming; Liu, Wen-Jun; Wang, Yong-Ping; Huan, Ya-Wei; Ma, Gan; Zhu, Bao; Wu, Su-Dong; Yu, Wen-Jie; Horng, Ray-Hua; Xia, Chang-Tai; Sun, Qing-Qing; Ding, Shi-Jin; Zhang, David Wei
2018
Source PublicationAPPLIED PHYSICS LETTERS
Volume113Issue:3
AbstractThe energy band alignment of the atomic-layer-deposited In2O3/beta-Ga2O3((2) over bar 10) interface is evaluated by X-ray photoelectron spectroscopy. The X-ray diffraction pattern reveals that the In2O3 film grown at 160 degrees C is amorphous, while it becomes polycrystalline at a higher deposition temperature of 200 degrees C. The bandgaps, determined by reflection electron energy loss spectroscopy, are 4.65, 3.85, and 3.47 eV for beta-Ga2O3, polycrystalline In2O3, and amorphous In2O3, respectively. Both amorphous and polycrystalline In2O3/beta-Ga2O3 interfaces have Type I alignment. The conduction and valence band offsets at the polycrystalline (amorphous) In2O3/beta-Ga2O3 interface are 0.35 and 0.45 eV (0.39 and 0.79 eV), respectively. These observations suggest that polycrystalline In2O3 as an intermediate semiconductor layer is beneficial to the barrier reduction of metal/Ga2O3 contact. Published by AIP Publishing.
KeywordIn2o3 Indium Films Heterostructures Temperature Valence Offsets Gap
Subject AreaChemistry ; Energy & Fuels ; Materials Science
Language英语
Document Type期刊论文
Identifierhttp://ir.nimte.ac.cn/handle/174433/17308
Collection2018专题
Recommended Citation
GB/T 7714
Sun, Shun-Ming,Liu, Wen-Jun,Wang, Yong-Ping,et al. Band alignment of In2O3/beta-Ga2O3 interface determined by X-ray photoelectron spectroscopy[J]. APPLIED PHYSICS LETTERS,2018,113(3).
APA Sun, Shun-Ming.,Liu, Wen-Jun.,Wang, Yong-Ping.,Huan, Ya-Wei.,Ma, Gan.,...&Zhang, David Wei.(2018).Band alignment of In2O3/beta-Ga2O3 interface determined by X-ray photoelectron spectroscopy.APPLIED PHYSICS LETTERS,113(3).
MLA Sun, Shun-Ming,et al."Band alignment of In2O3/beta-Ga2O3 interface determined by X-ray photoelectron spectroscopy".APPLIED PHYSICS LETTERS 113.3(2018).
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