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AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides
Li RW
2009
发表期刊Int. J. Nanotechnol.
卷号6期号:12页码:1067-1085
摘要Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films are very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created.; Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films are very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created.
关键词Afm Atomic Force Microscopy Nanolithography Nanostructure Nanodevice Perovskite Oxide
收录类别SCI
语种英语
文献类型期刊论文
条目标识符http://ir.nimte.ac.cn/handle/174433/225
专题宁波所知识产出
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Li RW. AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides[J]. Int. J. Nanotechnol.,2009,6(12):1067-1085.
APA Li RW.(2009).AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides.Int. J. Nanotechnol.,6(12),1067-1085.
MLA Li RW."AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides".Int. J. Nanotechnol. 6.12(2009):1067-1085.
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