AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides

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	AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides
	Li RW
	2009
Source Publication	Int. J. Nanotechnol.
Volume	6 Issue:12 Pages:1067-1085
Abstract	Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films are very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created.; Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films are very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created.
Keyword	Afm Atomic Force Microscopy Nanolithography Nanostructure Nanodevice Perovskite Oxide
Indexed By	SCI
Language	en
Document Type	期刊论文
Identifier	http://ir.nimte.ac.cn/handle/174433/225
Collection	宁波所知识产出
Recommended Citation GB/T 7714	Li RW. AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides[J]. Int. J. Nanotechnol.,2009,6(12):1067-1085.
APA	Li RW.(2009).AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides.Int. J. Nanotechnol.,6(12),1067-1085.
MLA	Li RW."AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides".Int. J. Nanotechnol. 6.12(2009):1067-1085.

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