KMS Ningbo Institute of Materials Technology &Engineering,CAS
AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides | |
Li RW | |
2009 | |
Source Publication | Int. J. Nanotechnol.
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Volume | 6Issue:12Pages:1067-1085 |
Abstract | Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films are very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created.; Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films are very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created. |
Keyword | Afm Atomic Force Microscopy Nanolithography Nanostructure Nanodevice Perovskite Oxide |
Indexed By | SCI |
Language | 英语 |
Document Type | 期刊论文 |
Identifier | http://ir.nimte.ac.cn/handle/174433/225 |
Collection | 宁波所知识产出 |
Recommended Citation GB/T 7714 | Li RW. AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides[J]. Int. J. Nanotechnol.,2009,6(12):1067-1085. |
APA | Li RW.(2009).AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides.Int. J. Nanotechnol.,6(12),1067-1085. |
MLA | Li RW."AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides".Int. J. Nanotechnol. 6.12(2009):1067-1085. |
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AFM lithography and (819KB) | 开放获取 | License | Application Full Text |
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