AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides

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	AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides
	Li RW
	2009
发表期刊	Int. J. Nanotechnol.
卷号	6 期号:12 页码:1067-1085
摘要	Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films are very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created.; Recent progress on atomic force microscopy (AFM) lithography on perovskite oxides, including doped SrTiO3 single crystalline substrates and artificial perovskite manganite films, are reviewed systematically. SrTiO3 is the commercial substrate extensively used for epitaxially growing perovskite oxide films and also a popular film material for fabricating functionalised devices. Perovskite manganite films are very promising candidate materials for spintronic devices and magnetic sensors. By combining AFM lithography and other techniques, such as film deposition, photo lithography, and wet etching etc., multifunctional nanodevices/nanostructures composed of perovskite oxides can be created.
关键词	Afm Atomic Force Microscopy Nanolithography Nanostructure Nanodevice Perovskite Oxide
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.nimte.ac.cn/handle/174433/225
专题	宁波所知识产出
推荐引用方式 GB/T 7714	Li RW. AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides[J]. Int. J. Nanotechnol.,2009,6(12):1067-1085.
APA	Li RW.(2009).AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides.Int. J. Nanotechnol.,6(12),1067-1085.
MLA	Li RW."AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides".Int. J. Nanotechnol. 6.12(2009):1067-1085.

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