KMS Ningbo Institute of Materials Technology &Engineering,CAS
阴极电弧制备TiAlN 薄膜工艺参数的正交分析研究 | |
陈锋光 ; 孙丽丽 ; 成 浩 ; 柯培玲 ; 汪爱英 | |
2011 | |
Document Type | 期刊论文 |
Identifier | http://ir.nimte.ac.cn/handle/174433/2783 |
Collection | 宁波所知识产出 |
Recommended Citation GB/T 7714 | 陈锋光,孙丽丽,成 浩,等. 阴极电弧制备TiAlN 薄膜工艺参数的正交分析研究[J],2011. |
APA | 陈锋光,孙丽丽,成 浩,柯培玲,&汪爱英.(2011).阴极电弧制备TiAlN 薄膜工艺参数的正交分析研究.. |
MLA | 陈锋光,et al."阴极电弧制备TiAlN 薄膜工艺参数的正交分析研究".(2011). |
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File Name/Size | DocType | Version | Access | License | ||
阴极电弧制备TiAlN薄膜工艺参数的正交(2211KB) | 开放获取 | CC BY-NC-SA | Application Full Text |
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